Integrated multisensors for industrial humidity measurement

The measurement of humidity plays an increasing role in technical and nontechnical processes. Especially for guarantee of the quality, reducing cost and better long term stability a lot of processes require sensors with better immunity against environmental influences. To solve these problems a sensor system Is necessary which Is able to compensate the influences on different parts of the system from the material point of view. The alternative consists in the measurement of the different influences by multisensors with Intelligent error compensation. A favourable and unique solution for such problems is the monolithic integrated CCC*-dew point sensor working on the equilibrium state of condensation and evaporation. This sensor system as a typical micro system utilises the cost advantages of the batch processes and allows the integration of a lot of multisensors.