Title :
Dielectric charging characterization in MEMS switches with insulator-insulator contact
Author :
Molinero, David ; Cunningham, Shawn ; DeReus, D. ; Morris, Art
Author_Institution :
Wispry, Inc., Irvine, CA, USA
Abstract :
A dielectric charging characterization is presented based on simple MEMS structures with insulator-insulator contact. Surface charging is generated by triboelectric effects when the MEMS switch is actuated and both insulators are in contact. Hold-down measurements were done to characterize the surface charging over a broad range of voltage and temperature. The results have shown that the pull-in voltage shift is a key charging parameter with a characteristic temperature dependent time constant.
Keywords :
microswitches; surface charging; triboelectricity; MEMS structures; MEMS switches; characteristic temperature dependent time constant; dielectric charging characterization; hold-down measurements; insulator-insulator contact; pull-in voltage shift; surface charging; triboelectric effects; Dielectrics; Micromechanical devices; Radio frequency; Surface charging; Surface impedance; Temperature measurement; Voltage measurement; Charging; Dielectrics; Micromechanical Devices; RF MEMS; Switches; triboelectric effects;
Conference_Titel :
Reliability Physics Symposium, 2014 IEEE International
Conference_Location :
Waikoloa, HI
DOI :
10.1109/IRPS.2014.6860668
