DocumentCode
1868230
Title
The long path from MEMS resonators to timing products
Author
Ng, E. ; Yang, Y. ; Hong, V.A. ; Ahn, C.H. ; Heinz, D.B. ; Flader, I. ; Chen, Y. ; Everhart, C.L.M. ; Kim, B. ; Melamud, R. ; Candler, R.N. ; Hopcroft, M.A. ; Salvia, J.C. ; Yoneoka, S. ; Graham, A.B. ; Agarwal, M. ; Messana, M.W. ; Chen, K.L. ; Lee, H.K.
Author_Institution
Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA
fYear
2015
fDate
18-22 Jan. 2015
Firstpage
1
Lastpage
2
Abstract
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.
Keywords
micromechanical resonators; MEMS resonators; SiTime; technological developments; Encapsulation; Micromechanical devices; Sensors; Silicon; Thermal stability; Timing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location
Estoril
Type
conf
DOI
10.1109/MEMSYS.2015.7050869
Filename
7050869
Link To Document