Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems

In this research, we report the novel design, fabrication and testing of an assembled comb-drive XYZ-microstage that produces highly decoupled motions into X-, Y-, and Z-directions for the three-dimensional (3D) scanning stage of magnetic resonance force microscopy. The XYZ-microstage based on assembling technology consists of three separated parts, i.e., a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate. The separated parts are assembled together by using micro manipulators and a guide block of stainless steel. It is demonstrated that the assembled XYZ-microstage can achieve large displacements of 25.2 μm in X direction, 20.4 μm in Y direction and 58.5 μm in Z direction.