DocumentCode :
1868622
Title :
Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors
Author :
Dellea, Stefano ; Giacci, Federico ; Longoni, Antonio ; Rey, Patrice ; Berthelot, Audrey ; Langfelder, Giacomo
Author_Institution :
Politec. di Milano, Milan, Italy
fYear :
2015
fDate :
18-22 Jan. 2015
Firstpage :
37
Lastpage :
40
Abstract :
This work presents in-plane and out-of-plane Coriolis rate gyroscopes based on nano-scale piezoresistive readout and using an eutectic bonding between the bottom wafer, where the sensor is formed, and the cap wafer, where routing and metal pads are fabricated. The gyroscopes feature a novel design with a central levered sense frame, to maximize the device symmetry and compactness. The position of the piezoresistive nano-gauges along the lever system optimizes the scale-factor. Operation on a ± 3000 dps full-scale-range (FSR) demonstrates quite competitive performance, with a linearity error lower than 0.25% and a cross-axis rejection 50× better than state-of-the art consumer gyroscopes.
Keywords :
gyroscopes; nanosensors; piezoresistive devices; resistors; bottom wafer; central levered sense frame; coriolis rate gyroscope; cross-axis rejection; eutectic bonding; low-power 3-axis gyroscope; metal pad; nanoscale piezoresistive readout; nanoscale piezoresistor; piezoresistive nanogauge; sensor; Bonding; Gyroscopes; Linearity; Micromechanical devices; Performance evaluation; Piezoresistance; Sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
Type :
conf
DOI :
10.1109/MEMSYS.2015.7050880
Filename :
7050880
Link To Document :
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