A nanomachined tunable oscillator controlled by electrostatic and optical force

Author

Huang, J.G. ; Dong, B. ; Cai, H. ; Gu, Y.D. ; Wu, J.H. ; Chen, T.N. ; Yang, Z.C. ; Jin, Y.F. ; Hao, Y.L. ; Kwong, D.L. ; Liu, A.Q.

Author_Institution

Sch. of Mech. Eng., Xian Jiaotong Univ., Xian, China

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

45

Lastpage

48

Abstract

We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely sensitive to the motional signal, which is often overwhelmed by background noise.

Keywords

electrostatics; micromachining; micromechanical devices; oscillators; springs (mechanical); background noise; electrical spring; electrostatic force; electrostatic tuning; high-Q optical cavity; miniaturized optomechanical oscillator; motional signal; nanomachined tunable oscillator; optical force; Electrostatics; Force; Optical pumping; Optical ring resonators; Optical sensors; Oscillators; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7050882

Filename

7050882