DocumentCode :
1868993
Title :
Novel ionic liquid - polymer composite and an approach for its patterning by conventional photolithography
Author :
Bakhtina, Natalia A. ; Voigt, Anja ; MacKinnon, Neil ; Ahrens, Gisela ; Gruetzner, Gabi ; Korvink, Jan G.
Author_Institution :
IMTEK - Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
fYear :
2015
fDate :
18-22 Jan. 2015
Firstpage :
97
Lastpage :
101
Abstract :
A novel crosslinkable, conductive, highly transparent composite material based on a photoresist and an ionic liquid (the names of the composites are not announced here due to the current procedure of patenting) is presented. The composite possesses a good and stable ionic conductivity (up to 10 mS cm-1 at room temperature) over a wide frequency bandwidth (1 kHz - 1 MHz) and is optically transparent (transmission value of 90 % for a 170 μm thick film). In addition, an approach for the patterning of the composite material by conventional photolithography with a good spatial resolution (line width of 20 - 30 μm) is introduced. The unique properties of the material are utilized for time- and cost-saving direct manufacturing of electrically conductive, highly transparent microcomponents.
Keywords :
filled polymers; ionic conductivity; optical materials; photoresists; bandwidth 1 kHz to 1 MHz; crosslinkable conductive highly transparent composite material; distance 20 m to 30 m; electrically conductive manufacturing; ionic conductivity; ionic liquid-polymer composite; patenting procedure; patterning; photolithography; photoresist; size 170 m; temperature 293 K to 298 K; transparent microcomponent; Composite materials; Liquids; Optical device fabrication; Optical films; Polymers; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
Type :
conf
DOI :
10.1109/MEMSYS.2015.7050895
Filename :
7050895
Link To Document :
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