Title :
Tunable 2D electromagnetic band-gap (EBG) structures based on micro-electro-mechanical systems (MEMS) for THz frequencies
Author :
Sanz-Fernández, J. ; Goussetis, G. ; Cheung, R.
Author_Institution :
Scottish Microelectron. Centre, Univ. of Edinburgh, Edinburgh, UK
Abstract :
In this work, the authors report various tunable THz EBG structures consisting on movable MEMS membranes, allowing rearrangement of single and multilayered periodic structures. The analysis, design and fabrication of the MEMS devices, as well as its integration with EBG structures, are discussed. Various examples of the devices applicability in EBG structures, such as FSS and AMC, are presented.
Keywords :
micromechanical devices; photonic band gap; MEMS device; THz frequency; microelectromechanical system; movable MEMS membranes; multilayered periodic structures; tunable 2D electromagnetic band-gap structures; tunable THz EBG structures; Biomembranes; Dielectrics; Frequency selective surfaces; Metamaterials; Micromechanical devices; Periodic structures; Resonant frequency;
Conference_Titel :
Antennas and Propagation Society International Symposium (APSURSI), 2010 IEEE
Conference_Location :
Toronto, ON
Print_ISBN :
978-1-4244-4967-5
DOI :
10.1109/APS.2010.5560914
