Title :
Hotplate-based conductometric monolithic CMOS gas sensor system
Author :
Barrettino, Diego ; Graf, M. ; Taschini, S. ; Zimmermann, M. ; Hagleitner, C. ; Hierlemann, A. ; Baltes, H.
Author_Institution :
Phys. Electron. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland
Abstract :
A single-chip conductometric gas sensor system fabricated in industrial CMOS-technology with post-CMOS micromachining is presented, which comprises a tin dioxide-covered microhotplate, a digital temperature controller (200-350/spl deg/C/spl plusmn/2/spl deg/C), a logarithmic converter for the tin dioxide resistor and a serial interface. All necessary driving circuitry and A/D conversion units were realized on chip. The chip communication is handled with an I2C digital standard interface. Gas tests evidenced a detection limit below 1 ppm for carbon monoxide.
Keywords :
CMOS integrated circuits; analogue-digital conversion; driver circuits; electric heating; gas sensors; micromachining; resistors; tin compounds; 200 to 352 degC; A/D conversion units; CMOS technology; I2C digital standard interface; SnO/sub 2/; carbon monoxide; conductometric monolithic CMOS gas sensor; digital temperature controller; driving circuitry; logarithmic converter; microhotplate; micromachining; tin dioxide resistor; Digital control; Electrical equipment industry; Gas detectors; Gas industry; Industrial control; Micromachining; Temperature control; Temperature sensors; Textile industry; Tin;
Conference_Titel :
VLSI Circuits, 2003. Digest of Technical Papers. 2003 Symposium on
Conference_Location :
Kyoto, Japan
Print_ISBN :
4-89114-034-8
DOI :
10.1109/VLSIC.2003.1221188
