Title :
Failure mechanism of VCSELs in optical mouse applications at non-hermitic conditions
Author :
Dreybrodt, J. ; Malacarne, F.
Author_Institution :
EM Microelectron. - Marin SA (Swatch Group), Marin, Switzerland
fDate :
June 29 2015-July 2 2015
Abstract :
Field failure modes are studied for VCSELs in high volume optical mouse applications in non-hermetic conditions. A new signature of catastrophic optical damage (COD) was reproduced by using temperature humidity tests without a ramp. Such conditions cause oxidation for a VCSEL type with a Gallium Arsenide cap layer. The robustness against environmental influences can be improved by adding a Silicon Nitride top layer. However weaknesses in such layer resulting in another failure mode of delamination.
Keywords :
III-V semiconductors; delamination; failure analysis; gallium arsenide; oxidation; silicon compounds; surface emitting lasers; GaAs; SiN; VCSEL; catastrophic optical damage; delamination; failure mechanism; field failure modes; gallium arsenide cap layer; high volume optical mouse; nonhermitic conditions; oxidation; silicon nitride top layer; temperature humidity tests; Gallium arsenide; High-speed optical techniques; Mice; Optical reflection; Optical sensors; Silicon compounds; Vertical cavity surface emitting lasers;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224416
