Title :
Hollow MEMS mass sensors for real-time particles weighing and sizing from a few 10 nm to the μm scale
Author :
Hadji, Celine ; Berthet, Clement ; Baleras, Francois ; Cochet, Martine ; Icard, Beatrice ; Agache, Vincent
Author_Institution :
Univ. Grenoble Alpes, Grenoble, France
Abstract :
This paper reports hollow MEMS plate oscillators for mass sensing in liquid with an extracted mass resolution of 4 femtograms. The sensors performances - 10,000-range Q factor and ppb-range frequency stability - make them amenable to individual particles metrology from a few 10 nm up to the micrometer diameter range. These devices are operating in air, connected through a customized plug and play test platform and do not need to work in a vacuum-sealed package.
Keywords :
frequency stability; microsensors; oscillators; particle detectors; weighing; frequency stability; hollow MEMS mass sensor; hollow MEMS plate oscillator; mass resolution extraction; particle metrology; plug and play test platform; real-time particles weighing; vacuum-sealed packaging; Electrodes; Fluids; Micromechanical devices; Nanoparticles; Resonant frequency; Sensor phenomena and characterization;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050916
