• DocumentCode
    1869851
  • Title

    Dynamically-balanced folded-beam suspensions

  • Author

    Shmulevich, Shai ; Hotzen, Inbar ; Elata, David

  • Author_Institution
    Fac. of Mech. Eng., Technion - Israel Inst. of Technol., Haifa, Israel
  • fYear
    2015
  • fDate
    18-22 Jan. 2015
  • Firstpage
    215
  • Lastpage
    218
  • Abstract
    We present a complete methodology for designing a new folded-beam suspension which responds as a linear spring at the fundamental resonance. This is in sharp contrast to the response of standard folded-beam suspensions. The static response of the standard folded-beam suspension is linear over a wide range of motions. But, surprisingly, the dynamic response of the standard folded-beam suspension is strongly nonlinear for small motion amplitudes that are larger than the width of the flexure beams. We have previously shown experimental evidence of this problem with the standard suspension. In contrast, the stiffness of the new dynamically balanced folded-beam suspension is not affected by motion amplitude. In the present work we show new experimental evidence demonstrating that the new design solves this problem.
  • Keywords
    beams (structures); design engineering; dynamic response; elasticity; springs (mechanical); suspensions (mechanical components); dynamic response; dynamically-balanced folded-beam suspensions; flexure beams; folded-beam suspension design; fundamental resonance; linear spring; small motion amplitudes; static response; stiffness; Dynamics; Electrostatics; Frequency measurement; Laser beams; Resonant frequency; Standards; Suspensions;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
  • Conference_Location
    Estoril
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2015.7050925
  • Filename
    7050925