Title :
A novel alternating-pump technique for picosecond ultrasonic study of Mo/Si multilayers
Author :
Nen-Wen Pu ; Seongtae Jeong ; Ri-An Zhao ; Boker, Jurgen
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
Summary form only given. Mo/Si multilayer mirror coatings are a key enabling technology for extreme ultraviolet lithography. The authors show that picosecond ultrasonics has proven to be a useful technique for the study of thin films and multilayers and can be used as a nondestructive characterization tool for these nanostructures.
Keywords :
elemental semiconductors; mirrors; molybdenum; optical multilayers; photoacoustic spectra; semiconductor superlattices; silicon; time resolved spectra; Mo-Si; Mo/Si multilayer mirror coatings; Mo/Si multilayers; alternating-pump technique; nanostructures; nondestructive characterization tool; photoacoustic spectra; picosecond ultrasonic study; picosecond ultrasonics; Absorption; Data analysis; Dielectrics; Excitons; Magnetic field measurement; Nonhomogeneous media; Quantum well devices; Refractive index; Resonance; Solids;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-595-1
DOI :
10.1109/CLEO.1999.834250
