Title :
Improved CT reconstruction resolution using Differential Cone-Beam CT reconstruction
Author :
Syahirah, Z. ; Zee, B. ; Liu, T.
Author_Institution :
Adv. Micro Devices (Singapore) Pte Ltd., Singapore, Singapore
fDate :
June 29 2015-July 2 2015
Abstract :
This paper describes the use of Differential Cone-Beam algorithm to improve CT reconstruction resolution for enhanced visualization of semiconductor flip chip package defects. Results demonstrated improvements in CT reconstruction resolution and time.
Keywords :
flip-chip devices; semiconductor device packaging; CT reconstruction resolution; differential cone-beam CT reconstruction; enhanced visualization; semiconductor flip chip package defects; Computed tomography; Failure analysis; Image reconstruction; Image resolution; Reconstruction algorithms; Software; X-ray imaging;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224448
