DocumentCode
1870319
Title
Detector and data acquisition system for an imaging ellipsometer
Author
Karlsson, Björn
Author_Institution
Dept. of Phys. & Meas. Technol., Linkoping Univ., Sweden
Volume
1
fYear
1998
fDate
18-21 May 1998
Firstpage
679
Abstract
This paper describes a CCD detector to be used for imaging ellipsometry. For imaging ellipsometry a fast detector with a high resolution is wanted. It is also important to have control over the gain. The systems on the market today fulfill the speed and resolution criteria, but they lack the possibility to control the gain. The detector and data acquisition system described in this paper has a maximum sampling speed of approximately 20 pictures/second, a resolution of 11-12 bits and a manually adjustable gain
Keywords
CCD image sensors; data acquisition; ellipsometers; gain control; CCD detector; data acquisition system; gain control; imaging ellipsometer; manually adjustable gain; resolution; sampling speed; Charge coupled devices; Data acquisition; Detectors; Ellipsometry; High-resolution imaging; Image resolution; Optical imaging; Optical surface waves; Photodiodes; Sampling methods;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference, 1998. IMTC/98. Conference Proceedings. IEEE
Conference_Location
St. Paul, MN
ISSN
1091-5281
Print_ISBN
0-7803-4797-8
Type
conf
DOI
10.1109/IMTC.1998.679879
Filename
679879
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