Fabrication of a monolithic carbon mold for producing a mixed-scale PDMS channel network using a single molding process

We introduce a novel batch fabrication technique of a monolithic carbon mold for producing a mixed-scale polydimethylsiloxane (PDMS) channel network consisting of nanochannels and microchannels with micro-pillars. Nanofluidics has attracted much attention because of their distinguishing properties. However, the research on the nanofluidics is limited by complex nanofabrication techniques. In this paper, a mixed-scale monolithic carbon mold was simply fabricated using a batch carbon-MEMS process consisting of two successive UV-lithography processes and a single pyrolysis. Then, PDMS channel networks was completed by soft molding process. By modulating pyrolysis conditions, the surface energy of the pyrolyzed carbon mold could be optimized for efficient PDMS channel demolding.