DocumentCode
1870646
Title
Fault isolation using Electrically-enhanced LADA (EeLADA)
Author
Goh, S.H. ; Yeoh, B.L. ; You, G.F. ; Hao, Hu ; Sio, W.L. ; Lam, Jeffrey ; Chua, C.M.
Author_Institution
Technol. Dev., Product Test & Failure Anal., GLOBALFOUNDRIES, Singapore, Singapore
fYear
2015
fDate
June 29 2015-July 2 2015
Firstpage
572
Lastpage
576
Abstract
Pulsed-LADA is found to play an important role in the advancement of next-generation LADA and it is reported that tens of μs pulses with 10 kHz frequency is sufficient to observe enhancements in carrier injection. Electrically-enhanced LADA (EeLADA), based on pulsed-LADA, is introduced as a new fault localization method capable to overcome current limitation of Laser Assisted Device Alteration (LADA) application on soft failure and extends it to hard failure debug. We present the EeLADA methodology and experimental data to demonstrate its feasibility.
Keywords
fault location; integrated circuit reliability; integrated circuit testing; laser beam applications; laser beam effects; carrier injection; electrically enhanced LADA; fault isolation; fault localization method; laser assisted device alteration; Failure analysis; Laser beams; Pins; Scanning electron microscopy; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location
Hsinchu
Type
conf
DOI
10.1109/IPFA.2015.7224461
Filename
7224461
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