• DocumentCode
    1870646
  • Title

    Fault isolation using Electrically-enhanced LADA (EeLADA)

  • Author

    Goh, S.H. ; Yeoh, B.L. ; You, G.F. ; Hao, Hu ; Sio, W.L. ; Lam, Jeffrey ; Chua, C.M.

  • Author_Institution
    Technol. Dev., Product Test & Failure Anal., GLOBALFOUNDRIES, Singapore, Singapore
  • fYear
    2015
  • fDate
    June 29 2015-July 2 2015
  • Firstpage
    572
  • Lastpage
    576
  • Abstract
    Pulsed-LADA is found to play an important role in the advancement of next-generation LADA and it is reported that tens of μs pulses with 10 kHz frequency is sufficient to observe enhancements in carrier injection. Electrically-enhanced LADA (EeLADA), based on pulsed-LADA, is introduced as a new fault localization method capable to overcome current limitation of Laser Assisted Device Alteration (LADA) application on soft failure and extends it to hard failure debug. We present the EeLADA methodology and experimental data to demonstrate its feasibility.
  • Keywords
    fault location; integrated circuit reliability; integrated circuit testing; laser beam applications; laser beam effects; carrier injection; electrically enhanced LADA; fault isolation; fault localization method; laser assisted device alteration; Failure analysis; Laser beams; Pins; Scanning electron microscopy; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
  • Conference_Location
    Hsinchu
  • Type

    conf

  • DOI
    10.1109/IPFA.2015.7224461
  • Filename
    7224461