Title :
The Origin of so-called ghost modulated reflectance mapping and its application in FA
Author :
Zhongling Qian ; Brillert, Christof ; Burmer, Christian
Author_Institution :
Infineon Technol. AG, Munich, Germany
fDate :
June 29 2015-July 2 2015
Abstract :
In this paper, the so-called ghost modulated reflectance mapping (GMRM) outside field effect transistor (FET) active regions is studied with a simplified interference model and discussed in detail. It aims at gaining an insight into the mechanism of its formation. Although such ghost image is not expected, it can also be taken into use in optimal optical frequency mapping/voltage probing in advanced logic/power IC products.
Keywords :
field effect transistors; optical images; reflectivity; semiconductor device models; semiconductor device reliability; semiconductor device testing; FA; FET active regions; GMRM; failure analysis; field effect transistor; ghost image; ghost modulated reflectance mapping; interference model; logic-power IC products; optimal optical frequency mapping; voltage probing; Integrated optics; Interference; Optical diffraction; Optical imaging; Optical modulation; Optical reflection; Reflectivity;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224462
