DocumentCode
1871079
Title
Mechanical characterization of thin films using a MEMS device inside SEM
Author
Changhong Cao ; Chen, Brandon ; Filleter, Tobin ; Yu Sun
Author_Institution
Univ. of Toronto, Toronto, ON, Canada
fYear
2015
fDate
18-22 Jan. 2015
Firstpage
381
Lastpage
384
Abstract
A MEMS device was developedfor mechanical characterization of 2D ultra-thin films. The device utilizes electrothermal actuators to apply uniaxial tension. The robust design makes the device capable of withstanding both dry and wet transfer of 2D ultra-thin film materials onto the suspended structures of the device. Fracture stress of thin graphene oxide (GO) films was measured.
Keywords
actuators; fracture; graphene; internal stresses; micromechanical devices; scanning electron microscopy; thin films; 2D ultra-thin films; CO; MEMS device; SEM; dry transfer; electrothermal actuators; fracture stress; mechanical characterization; suspended structures; thin graphene oxide films; uniaxial tension; wet transfer; Actuators; Fabrication; Films; Graphene; Micromechanical devices; Stress; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location
Estoril
Type
conf
DOI
10.1109/MEMSYS.2015.7050969
Filename
7050969
Link To Document