Title :
Large area cathode development for high rate deposition of amorphous and nano crystalline silicon
Author :
Li, Yang ; Jones, Scott ; Kumar, Arun ; Cannella, Vin ; Yang, Jeffrey ; Guha, Subhendu
Author_Institution :
United Solar Ovonic LLC, Troy, MI, USA
Abstract :
United Solar Ovonic LLC. has developed a large area cathode for high rate plasma enhanced chemical vapor deposition (PECVD) using high frequency (HF, 10s to 100s MHz) which will enable us to build roll-to-roll (RTR) production systems for silicon based thin film solar cells.
Keywords :
amorphous semiconductors; elemental semiconductors; plasma CVD; semiconductor thin films; silicon; solar cells; Si; amorphous silicon; high rate deposition; large area cathode development; nano crystalline silicon; plasma enhanced chemical vapor deposition; roll-to-roll production systems; silicon based thin film solar cells; Cathodes; Couplings; Electric fields; Films; Hafnium; Photovoltaic cells; Radio frequency;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-9966-3
DOI :
10.1109/PVSC.2011.6186584
