Title :
Design and simulation of 10 MHz MEMS oscillator
Author :
Taufik, Syamsi ; Khan, Sharifullah ; Nordin, A.N. ; Zainuddin, A.
Author_Institution :
ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
Abstract :
Design and analysis of a 10MHz CMOS-MEMS oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam (CC-beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with a supporting amplifier circuit. The OP AMP achieves a gain of 21dB at VDD of 1.8 V and VSS of -1.8 V. The two-stage CMOS OP AMP is combined with 10MHz CC-beam resonator to create an oscillator at the frequency of ~10MHz with loop gain of 16dB. The oscillator is simulated using Cadence Design Systems™.
Keywords :
CMOS analogue integrated circuits; RLC circuits; equivalent circuits; integrated circuit design; micromechanical resonators; operational amplifiers; oscillators; CC-beam resonator; CMOS-MEMS clamped-clamped beam resonator structure; CMOS-MEMS oscillator; Cadence design system; RLC equivalent circuit approach; amplifier circuit; frequency 10 MHz; gain 16 dB; gain 21 dB; oscillator circuit simulations; two-stage CMOS OP AMP; voltage -1.8 V; voltage 1.8 V; CMOS integrated circuits; Electrodes; Micromechanical devices; Operational amplifiers; Oscillators; Resonant frequency; Transistors; CC-beam resonator; Cadence; MEMS-based oscillator; Two-stage CMOS op amp;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC) Proceedings, 2014 IEEE International
Conference_Location :
Montevideo
DOI :
10.1109/I2MTC.2014.6860920
