DocumentCode :
1872239
Title :
Crystallinity and electrical properties of hydrogenated microcrystalline silicon germanium by RF-PECVD for solar cell application
Author :
Zhao, Lai ; Chae, Yong Kee ; Song, Daoying ; Wang, Dapeng ; Yuan, Zheng
Author_Institution :
Appl. Mater. Inc., Santa Clara, CA, USA
fYear :
2011
fDate :
19-24 June 2011
Abstract :
The deposition process of hydrogenated microcrystalline silicon germanium (μc-SiGe:H) film is developed with Applied Materials´ AKT4300 PECVD system (substrate size: 600×720mm2) at the deposition rate up to 5Å/s. The crystallinity and the chemical composition are characterized with Raman scattering spectroscopy and X-ray diffraction (XRD) analysis. The peak shift of the Si-Si transverse optic (TO) vibration modes by Raman spectra indicates the incorporation of Ge atoms. The peak of the (220) plane by the XRD also shifts to smaller 2-theta value due to increased interplanar spacing. The grain size is calculated around 80~90Å based on the (220) peak position and full width at half maximum (FWHM) and verifies that the film is microcrystalline. The temperature dependent dark and photo conductivity are measured around 1×10-7 and 1×10-5 S/cm respectively which are within the range of microcrystalline. The activation energy is deduced around 1.1~1.2 eV. The incorporation of Ge atoms changes the crystallinity and electrical properties of the microcrystalline silicon film accordingly while maintains the deposition rate and makes it promising to improve the film quality as the absorber layer in the multi-junction solar cell.
Keywords :
Ge-Si alloys; Raman spectra; X-ray diffraction; hydrogen; plasma CVD; solar cells; thin film devices; vibrational modes; FWHM; RF-PECVD; Raman scattering spectroscopy; Raman spectra; SiGe:H; TO vibration mode; X-ray diffraction analysis; XRD analysis; absorber layer; applied material AKT4300 PECVD system; chemical composition; crystallinity property; deposition processing; electrical property; film quality improvement; full width at half maximum; hydrogenated microcrystalline film; interplanar spacing; multijunction solar cell; photoonductivity measurement; solar cell application; temperature dependent dark measurement; transverse optic vibration mode; Conductivity; Conductivity measurement; Films; Photovoltaic cells; Silicon germanium; Temperature measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location :
Seattle, WA
ISSN :
0160-8371
Print_ISBN :
978-1-4244-9966-3
Type :
conf
DOI :
10.1109/PVSC.2011.6186597
Filename :
6186597
Link To Document :
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