• DocumentCode
    1872328
  • Title

    Single-layer microfluidic current source via optofluidic lithography

  • Author

    Glick, C.C. ; Peng, S. ; Chung, M. ; Korner, K. ; Veale, M. ; Liu, C. ; Moore, J. ; Chu, A. ; Buckley, A. ; Iwai, K. ; Sochol, R.D. ; Lin, L.

  • Author_Institution
    Univ. of California, Berkeley, Berkeley, CA, USA
  • fYear
    2015
  • fDate
    18-22 Jan. 2015
  • Firstpage
    551
  • Lastpage
    554
  • Abstract
    This work marks the first use of in-situ photopolymerization to create single-layer microfluidic devices which serve as ultra-low Reynolds Number (Re) current sources to regulate fluid flow rate independent of operating pressures. Autonomous fluidic components are an emerging aspect of micro/nanofluidic circuits and applications; however, many existing fluidic applications require specific pressure and/or flow rate conditions to perform optimally, and many require complex and expensive fabrication procedures. Here we introduce single-layer microfluidic system which utilize a spring and piston system - fabricated in situ via optofluidic lithography - to passively constrain fluid flow rate to a value independent of operating pressure. Experimental results revealed controlled flow rates of 29.2 ± 0.8 μl/min (from P = 50-100 mbar) and a maximum small-signal resistivity of 141.1 mbar-min/μl, which represents the highest performance for a low-pressure microfluidic current source.
  • Keywords
    microfluidics; nanofluidics; nanolithography; polymerisation; autonomous fluidic components; fluid flow rate; in situ photopolymerization; microfluidic circuits; nanofluidic circuits; optofluidic lithography; piston system; pressure 50 mbar to 100 mbar; single layer microfluidic current source; single-layer microfluidic devices; spring system; ultra-low Reynolds number; Conductivity; Lithography; Microfluidics; Pistons; Resistance; Springs; Valves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
  • Conference_Location
    Estoril
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2015.7051014
  • Filename
    7051014