Title :
Cathodic arc plasma density and profile measurements
Author :
Wood, B.P. ; Tuszewski, M.G. ; Pesensen, D. ; Wessel, F.
Author_Institution :
Los Alamos Nat. Lab., NM, USA
Abstract :
Summary form only given. We report a series of measurements of ion current density (with a Faraday cup) and integrated electron line density (with a microwave interferometer) for a cathodic arc derived plasma. The ion current measurements were made at various radii from the center of the plasma plume. We compare the differences in electron density and plasma radial profile between cathode materials (erbium and titanium), are current (100 A to 400 A), pressure (10/sup -6/ torr to 10/sup -3/ torr), and the presence or absence of a series magnetic solenoid around the coaxial anode and cathode.
Keywords :
arcs (electric); electromagnetic wave interferometry; plasma density; plasma diagnostics; 100 to 400 A; 1E-6 to 1E-3 torr; Er; Faraday cup; Ti; cathodic arc derived plasma; cathodic arc plasma density; coaxial anode; coaxial cathode; electron density; integrated electron line density; ion current density; ion current measurements; microwave interferometer; plasma radial profile; series magnetic solenoid; Cathodes; Current density; Current measurement; Density measurement; Electrons; Magnetic materials; Microwave measurements; Plasma density; Plasma materials processing; Plasma measurements;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.604898
