DocumentCode

1872381

Title

An Integrated Micro Servosystem

Author

Fujita, Hideaki ; Harada, Masaaki ; Sato, Kiminori

Author_Institution

Institute of Industrial science, The University of Tokyo

fYear

1988

fDate

Oct. 31 1988-Nov. 2 1988

Firstpage

15

Lastpage

20

Keywords

Biosensors; Capacitance; Capacitive sensors; Electrodes; Electrostatic actuators; Force sensors; Hardware; Mechanical sensors; Servosystems; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots, 1988., IEEE International Workshop on

Conference_Location

Tokyo, Japan

Type

conf

DOI

10.1109/IROS.1988.592392

Filename

592392