Title :
Vertical membrane microvalves in PDMS
Author :
Hansson, Jonas ; Hillmering, Mikael ; Haraldsson, Tommy ; van der Wijngaart, Wouter
Author_Institution :
Micro & Nanosyst., KTH R. Inst. of Technol., Stockholm, Sweden
Abstract :
We present the design, realization and evaluation of the first leak-tight vertical membrane pneumatic microvalve. The design freedom in the vertical valve configuration allows for a flow throughput per footprint area that is increased two orders of magnitude compared to horizontal membrane microvalves.
Keywords :
design engineering; microvalves; pneumatic systems; polymers; PDMS; horizontal membrane microvalve; leak-tight vertical membrane pneumatic microvalve; vertical valve configuration; Actuators; Containers; Microfluidics; Microvalves; Throughput;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051017
