DocumentCode

1872449

Title

Servo Controller For Electrostatic Micro-actuators

Author

Hashimoto, Hiroya ; Kwee-Bo Sim ; Fujita, Hideaki ; Harashima, F.

Author_Institution

Institute of Industrial Science, University of Tokyo

fYear

1988

fDate

Oct. 31 1988-Nov. 2 1988

Firstpage

21

Lastpage

26

Keywords

Acceleration; Electrodes; Electrostatic actuators; Friction; Hardware; Insulation; Microactuators; Motion estimation; Servomechanisms; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots, 1988., IEEE International Workshop on

Conference_Location

Tokyo, Japan

Type

conf

DOI

10.1109/IROS.1988.592394

Filename

592394