Title :
Robotics In Microelectronics Manufacturing
Author_Institution :
Center for Robotic Systems in Microelectronics, University of California Santa Barbwa
fDate :
Oct. 31 1988-Nov. 2 1988
Keywords :
Application specific integrated circuits; Flexible manufacturing systems; Manufacturing automation; Manufacturing processes; Microelectronics; Production facilities; Prototypes; Robotics and automation; Robots; Semiconductor device manufacture;
Conference_Titel :
Intelligent Robots, 1988., IEEE International Workshop on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/IROS.1988.592397
