DocumentCode
1872696
Title
SOI Devices and Ring Oscillators on Thin Dielectric Membranes For Pressure Sensing Applications
Author
Olbrechts, B. ; Rue, B. ; Rinaldi, G. ; Stiharu, I. ; Flandre, D. ; Raskin, J.P.
Author_Institution
Univ. Catholique de Louvain, Louvain-la-Neuve
fYear
2007
fDate
1-4 Oct. 2007
Firstpage
109
Lastpage
110
Abstract
As first characterization results, static measurements showed variations between -2% and +6% of drain current of individual devices, VCOs revealed to be responsive to mechanical solicitation and, finally edgeless devices proved to be suitable for dynamic pressure sensing. Hence, the structure and the sensitivity of these systems allow us to figure out a wide range of possible applications, such as propeller shaft speed measurements.
Keywords
dielectric devices; membranes; pressure sensors; silicon-on-insulator; voltage-controlled oscillators; SOI devices; VCO; drain current; edgeless devices; pressure sensing; ring oscillators; static measurements; thin dielectric membranes; Biomembranes; Current measurement; Dielectric devices; Dielectric measurements; Mechanical variables measurement; Pressure measurement; Propellers; Ring oscillators; Shafts; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 2007 IEEE International
Conference_Location
Indian Wells, CA
ISSN
1078-621X
Print_ISBN
978-1-4244-0879-5
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2007.4357876
Filename
4357876
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