Title :
SOI Devices and Ring Oscillators on Thin Dielectric Membranes For Pressure Sensing Applications
Author :
Olbrechts, B. ; Rue, B. ; Rinaldi, G. ; Stiharu, I. ; Flandre, D. ; Raskin, J.P.
Author_Institution :
Univ. Catholique de Louvain, Louvain-la-Neuve
Abstract :
As first characterization results, static measurements showed variations between -2% and +6% of drain current of individual devices, VCOs revealed to be responsive to mechanical solicitation and, finally edgeless devices proved to be suitable for dynamic pressure sensing. Hence, the structure and the sensitivity of these systems allow us to figure out a wide range of possible applications, such as propeller shaft speed measurements.
Keywords :
dielectric devices; membranes; pressure sensors; silicon-on-insulator; voltage-controlled oscillators; SOI devices; VCO; drain current; edgeless devices; pressure sensing; ring oscillators; static measurements; thin dielectric membranes; Biomembranes; Current measurement; Dielectric devices; Dielectric measurements; Mechanical variables measurement; Pressure measurement; Propellers; Ring oscillators; Shafts; Velocity measurement;
Conference_Titel :
SOI Conference, 2007 IEEE International
Conference_Location :
Indian Wells, CA
Print_ISBN :
978-1-4244-0879-5
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2007.4357876
