A SOI CMOS Smart High-Temperature Sensor

Smart temperature sensors integrating on the same chip the solid-state sensor itself and the digital conversion present several advantages : lower cost, fewer connections, readiness of use. No such sensor exists today for high temperature applications (200-300degC). Bulk silicon implementations are limited to 160degC. The use of SOI allows us to extend significantly this range. The CMOS smart temperature sensor presented here, is designed to be functional over an extensive temperature range from 25degC to 250degC, it offers a 3degC accuracy (with only 2 calibration points) with a resolution of 0.8degC.