On the design of 60 GHz integrated antennas on 0.13 μm SOI technology

This work presents the performance of 0.13 μm Silicon on insulator technology in the design of 60 GHz fully integrated antennas. Three different types of antennas are considered and designed in order to study their ability to radiate efficiently at this frequency using specific IC technology in order to obtain good matching and higher radiation efficiency. A conductor backed coplanar waveguide is used to feed these antennas. The planar inverted F antenna, the slot antenna and the interdigitated dipole antenna show a good return loss and simulated radiation efficiency of 45%, 55% and 88% respectively. Backside substrate metallization has been used to improve radiation properties.