Title :
Water-proof ‘μ-diving suit’ dressed on resonant biochemical sensor for online detection in solution
Author :
Haitao Yu ; Ying Chen ; Pengcheng Xu ; Feng Yu ; Xinxin Li
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
This paper reports a new method to ensure resonant micro-sensor long-time resonating in solution for real-time biochemical sensing/analysis. By designing a water-proof `diving-suit´ for the cantilever resonator and an anti-leakage narrow `slit´ to free the cantilever vibration, only the sensing-region of the cantilever contacts to analyte solution, while the other parts are remained in air to keep free-resonance. With this `μ-diving suit´ design, the resonant cantilever with electrothermal driven and piezoresistive frequency readout integrated can achieve a Q factor of 17 in water. With specific sensing-material loaded at the sensing-region, the cantilever sensor experimentally realizes liquid-phase real-time detection to ppb-level organophosphorous pesticide of acephate.
Keywords :
bioMEMS; biochemistry; biosensors; cantilevers; chemical products; chemical sensors; microfabrication; microsensors; resonators; waterproofing; acephate ppb-level organophosphorous pesticide; analyte solution; antileakage narrow; cantilever resonator; cantilever sensing-region; cantilever sensor; cantilever vibration; electrothermal driven; liquid-phase real-time detection; mu-diving suit design; piezoresistive frequency readout integrated; real-time biochemical analysis; real-time biochemical sensing; resonant biochemical sensor; resonant microsensor; water-proof dressed; Chemicals; Liquids; Q-factor; Real-time systems; Resonant frequency; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051030
