Title :
Field emission from teepee-shaped carbon nanotube bundles
Author :
Busta, H. ; ToIt, Z. ; Montgomery, J. ; Feinerman, A.
Author_Institution :
Cabot Microelectron. Corp., Aurora, IL, USA
Abstract :
Carbon nanotubes were fabricated close together so that their separation is smaller than their height and field enhancement effects at the apexes of the tubes are diminished due to electrostatic shielding. Bundling was achieved by embedding the tubes into a PCVD silicon dioxide, followed by HF etching, water rinsing, and nitrogen drying. Emission measurements were performed in a vacuum system at a pressure of 4 × 10-9 Torr. Current-voltage characteristics were obtained at room temperature, 120 °C and 170 °C. Macroscopic current densities of 20 mA/cm2 were obtained with a 0.5 mm diameter tungsten anode. The turn-on fields are about 15 V/μm.
Keywords :
carbon nanotubes; current density; drying; etching; field emission; nanotechnology; plasma CVD; shielding; 0.5 mm; 120 degC; 170 degC; 20 degC; 4E-9 torr; C; HF etching; PCVD silicon dioxide; carbon nanotube bundles; current-voltage characteristics; electrostatic shielding; field emission measurements; field enhancement effects; macroscopic current densities; nanotube bundling; nitrogen drying; room temperature; teepee-shaped carbon nanotube; tungsten anode; turn-on fields; vacuum system; water rinsing; Carbon nanotubes; Current-voltage characteristics; Dry etching; Electrostatic measurements; Hafnium; Nitrogen; Performance evaluation; Pressure measurement; Silicon compounds; Vacuum systems;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354883
