• DocumentCode
    1873772
  • Title

    Asymmetric fan-shape-electrode for high-angle-detection-accuracy tactile sensor

  • Author

    Shi-Te Chuang ; Tsun-Yi Chen ; Yi-Cheng Chung ; Rongshun Chen ; Cheng-Yao Lo

  • Author_Institution
    Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2015
  • fDate
    18-22 Jan. 2015
  • Firstpage
    740
  • Lastpage
    743
  • Abstract
    This paper reports an up to 95.9% angle detection accuracy enhancement for capacitive tactile sensors, which entails asymmetric and intentionally shifted electrodes. The rotational shift between two electrodes of a capacitor that greatly contributed to angle detection errors was theoretically analyzed and examined by experiments with simulations. The asymmetric electrodes containing one fan- and one square-shape in capacitors reduced unexpected and rotational-shift induced errors, by keeping the same overlap area of the electrodes. The minimal angle detection resolution was improved from 5.8° to 0.3°, making the tactile sensor practical and reliable in artificial skins.
  • Keywords
    angular measurement; capacitance measurement; capacitive sensors; capacitors; electrodes; tactile sensors; artificial skin; asymmetric fan-shape-electrode; asymmetric shifted electrode; capacitive tactile sensor; capacitor; high-angle-detection-accuracy tactile sensor; intentionally shifted electrode; rotational-shift induced error; Capacitance; Capacitors; Educational institutions; Electrodes; Force; Silicon; Tactile sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
  • Conference_Location
    Estoril
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2015.7051064
  • Filename
    7051064