Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy

Author

Pettit, Chris ; Bongwon Jeong ; Hohyun Keum ; Joohyung Lee ; Jungkyu Kim ; Seok Kim ; McFarland, Donald Michael ; Bergman, Lawreence A. ; Vakakis, Alexander F. ; Cho, Hanna

Author_Institution

Dept. of Mech. Eng., Texas Tech Univ., Lubbock, TX, USA

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

752

Lastpage

755

Abstract

We report a new design concept of micromechanical cantilever system incorporating the 1:3 internal resonance during dynamic mode operation of atomic force microscopy (AFM). The passive amplification of third harmonic triggered through the mechanism of 1;3 internal resonance enables AFM to utilize multiple harmonics in an air environment. Detailed theoretical and experimental studies of the proposed design demonstrate that the multi-harmonic AFM (MH-AFM) is capable of simultaneous topography imaging and compositional mapping with more than 10-fold enhanced sensitivity.

Keywords

amplification; atomic force microscopy; cantilevers; micromechanical devices; MH-AFM; compositional mapping; internal resonance; microcantilever system; micromechanical cantilever system; multiharmonic atomic force microscopy; passive amplification; third harmonic triggering; topography imaging; Atomic force microscopy; Educational institutions; Force; Harmonic analysis; Resonant frequency; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051067

Filename

7051067