Title :
Printable flexible tactile pressure and temperature sensors with high selectivity against bending
Author :
Kanao, Kenichiro ; Harada, Shingo ; Yamamoto, Yuki ; Honda, Wataru ; Arie, Takayuki ; Akita, Seiji ; Takei, Kuniharu
Author_Institution :
Dept. of Phys. & Electron., Osaka Prefecture Univ., Sakai, Japan
Abstract :
Flexible electronics are of great interest in a future electric device such as artificial electronic devices. Especially, artificial electronic skin (e-skin) is widely studied by developing a tactile pressure sensor on a flexible substrate. However, conventional flexible tactile sensors also detect the bending of substrate without applying a tactile pressure, and that is the one of bottlenecks to realize stable operation of a flexible device. This study demonstrates the high selectivity of tactile pressure and temperature sensors against bending based on strain engineering. To achieve high selectivity, a cantilever type strain sensor in a flexible substrate is developed. In addition, the temperature sensor is also mechanically stable. It should be worth to note that these sensors are fabricated by a fully printing method using a screen printer. This finding and demonstration eventually allow us to apply the flexible devices on versatile surfaces with accurate sensing.
Keywords :
bending; cantilevers; flexible electronics; pressure measurement; pressure sensors; strain measurement; strain sensors; tactile sensors; temperature measurement; temperature sensors; artificial electronic device; artificial electronic skin; bending; cantilever type strain sensor; e-skin; flexible electronics; printable flexible tactile pressure sensor; printable flexible tactile temperature sensor; screen printer; strain engineering; Immune system; Ink; Robot sensing systems; Sensitivity; Strain; Substrates; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051068