Dog-bone resonator with high-Q in liquid for low-cost quick ‘test-paper’ detection of analyte droplet

Imitating on-site liquid-droplet analysis/assay with test-papers, a novel dog-bone resonator of tri-beam structure is proposed and developed for low-cost quick detection of trace amount biochemical liquid sample. With the specifically designed central beam, signal feed-through effect is effectively depressed by independent piezoresistive readout. Thereby, the new tri-beam resonator exhibits high-Q (=256) resonance factor of length-extension mode in liquid-droplet. Besides, non-SOI wafer and low-cost single-wafer single-side fabrication are developed to replace the previously used expensive SOI process for the cheap `test-paper´ disposable applications. With the low-cost fabricated MEMS `test-paper´, liquid-droplet detection function is experimentally demonstrated by on-site reorganization of 500ppb Hg²⁺ ion in water solution.