DocumentCode
1874133
Title
Nanotechnology: An Overview and Integration with MEMS
Author
Meyyappan, M. ; Li, Jing ; Li, Jun ; Cassell, Alan
Author_Institution
Center for Nanotechnology, NASA Ames Research Center, Moffett Field, CA 94035
fYear
2006
fDate
2006
Firstpage
1
Lastpage
3
Abstract
There are strong research programs in nanotechnology related to chemical sensors, electromechanical devices, actuators, biosensors, etc. in leading laboratories across the world. In many cases, practical systems demand seamless integration of the nanodevice with higher order structures, for example, MEMS. Examples of this using carbon nanotube based chemical and biosensors are presented.
Keywords
Biological materials; Biosensors; Chemical sensors; Magnetic materials; Micromechanical devices; Nanomaterials; Nanoscale devices; Nanotechnology; Sensor arrays; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627721
Filename
1627721
Link To Document