Title :
A graphene accelerometer
Author :
Hurst, Adam M. ; Sunwoo Lee ; Wujoon Cha ; Hone, James
Author_Institution :
Dept. of Mech. Eng., Columbia Univ., New York, NY, USA
Abstract :
This work presents an SU-8 clamped graphene nano-electro-mechanical-system (GNEMS) accelerometer. A suspended graphene membrane is circularly clamped by SU-8, with an additional proof mass made of either SU-8 or gold, located at the center of the membrane. This GNEMS accelerometer is approximately three orders of magnitude smaller than state of the art micro-electromechanical (MEMS) accelerometers with the diameter of the suspended graphene membrane being 3-10 μm and the proof mass diameter being 1-5 μm. Here, we present the fabrication, simulation, and experimental aperiodic calibration results of the GNEMS accelerometer, demonstrating a repeatable response to an input acceleration levels of ~1000-3000 g.
Keywords :
accelerometers; gold; graphene; nanosensors; Au; MEMS; SU-8; graphene accelerometer; graphene nano-electro-mechanical-system accelerometer; microelectromechanical accelerometers; size 1 mum to 5 mum; size 3 mum to 10 mum; Acceleration; Accelerometers; Fabrication; Graphene; Mathematical model; Micromechanical devices; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051096
