Micromachined SU-8 Probe Integrated with Film-bulk-acoustic Resonant Mass Sensor

This paper describes a micromachined SU-8 probe with an integrated film-bulk-acoustic resonant (FBAR) mass sensor at its tip. The probe shank is about 1.5mm long, 250 μm wide and 15 μm thick, and shows excellent structural flexibility and sturdiness. With a highly sensitive FBAR mass sensor at its tip, the probe can be inserted into biological and chemical environments to sense various chembio species, and has been shown to detect mercury ions in water with outstanding selectivity and sensitivity.