DocumentCode
1874681
Title
A MEMS Condenser Microphone for Consumer Applications
Author
Weigold, J.W. ; Brosnihan, T.J. ; Bergeron, J. ; Zhang, X.
Author_Institution
Analog Devices, Inc. Micromachined Products Division, Cambridge, MA, USA
fYear
2006
fDate
2006
Firstpage
86
Lastpage
89
Abstract
This paper describes the design, fabrication, testing, and characterization of a MEMS microphone fabricated at Analog Devices. The device consists of a polysilicon diaphragm suspended over a single crystal silicon backplate fabricated on silicon on insulator (SOI) wafers. The MEMS microphone has been successfully fabricated and tested in an anechoic chamber. The microphone is fabricated using a process that is compatible with inexpensive high volume production using unit processes that are currently used to fabricate inertial sensors. Details of the design, fabrication, and electrical and acoustic characterization of the microphone will be presented.
Keywords
Acceleration; Assembly systems; Costs; Electrets; Fabrication; Finite element methods; Micromechanical devices; Microphones; Signal processing; Silicon on insulator technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627742
Filename
1627742
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