DocumentCode :
1874684
Title :
Multi-modal graphene polymer interface characterization platform for vaporizable electronics
Author :
Gund, V. ; Ruyack, A. ; Camera, K. ; Ardanuc, S. ; Ober, C. ; Lal, A.
Author_Institution :
SonicMEMS Lab., Cornell Univ., Ithaca, NY, USA
fYear :
2015
fDate :
18-22 Jan. 2015
Firstpage :
873
Lastpage :
876
Abstract :
Characterization of physical and chemical properties of organic thin films such as polycarbonates is essential for their application-specific design. In this paper, we report a novel micromechanical resonant membrane platform with both graphene resistivity and mass-dependent frequency sensing to measure the thermal response, vaporization, and subsequent mass change of thin-film analytes deposited on top of the membrane. Graphene transferred on silicon nitride (SixNy) is below the analyte thin film, and the graphene resistance changes due to dangling bond interactions between the analyte film and graphene surface. At the same time, the resonance frequency of the analyte film/graphene/SixNy composite membrane changes with variations in temperature, mechanical properties, mass and elasticity of the analyte film. This device provides a bi-modal characterization of the organic thin film, both in the electrical and mechanical domain, which allows one to identify and optimize the organic film formulation. As an example, we demonstrate differentiating formulations of a polymer blend to realize low degradation temperature, which is critical for vaporizable electronics enabling low-power transience.
Keywords :
dangling bonds; graphene; micromechanical resonators; microsensors; silicon compounds; thin films; C; SixNy; analyte film elasticity; application-specific design; bimodal characterization; chemical property charaterization; composite membrane; dangling bond interactions; graphene resistivity; low degradation temperature; low-power transience; mass change; mass-dependent frequency sensing; mechanical properties; micromechanical resonant membrane platform; multimodal graphene polymer interface characterization platform; organic thin films; physical property characterization; polycarbonates; polymer blend; resonance frequency; thermal response measurement; thin-film analytes; vaporizable electronics; vaporization; Graphene; Heating; Polymers; Resonant frequency; Temperature measurement; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
Type :
conf
DOI :
10.1109/MEMSYS.2015.7051098
Filename :
7051098
Link To Document :
بازگشت