Title :
Pre-develop bake for end point stabilization with photo-BCB polymers
Author :
Scheck, D. ; Rogers, B. ; Garrou, P. ; Dibbs, M. ; Strandjord, A. ; Cummings, S. ; Ida, Y.
Author_Institution :
Dow Chem. Co., Research Triangle Park, NC, USA
Abstract :
The use of a bake prior to development stabilizes the develop end point of photo-BCB films and removes the time dependence of the develop end point. The elimination of this source of process variability enables the implementation of a develop process in which, for a given film thickness and set of bake conditions, the optimum develop time is a constant, and monitoring of the end point is unnecessary
Keywords :
optical polymers; photolithography; process control; bake conditions; end point stabilization; film thickness; photo-BCB polymers; pre-develop bake; process variability; Chemicals; Dielectrics; Dry etching; Optical buffering; Optical films; Optical sensors; Plasma temperature; Polymers; Resins; Wet etching;
Conference_Titel :
Advanced Packaging Materials, 1998. Proceedings. 1998 4th International Symposium on
Conference_Location :
Braselton, GA
Print_ISBN :
0-7803-4795-1
DOI :
10.1109/ISAPM.1998.664439
