DocumentCode
1874788
Title
Micro-machined XY stage for fiber optics module alignment
Author
Epitaux, Marc ; Verdeil, Jean-Marc ; Pétremand, Yves ; Noell, Wilifried ; De Rooij, Nicoolas F.
Author_Institution
Intel, Newark, CA, USA
Volume
4
fYear
2005
fDate
6-11 March 2005
Abstract
A novel silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. A MEMS micro-alignment method and silicon chip design are described. Finally the micro-fabricated device performance is discussed.
Keywords
microlenses; micromachining; micromechanical devices; optical transmitters; optoelectronic devices; silicon; MEMS micro-alignment method; fiber optics module alignment; hybrid micro-lens; micro-fabricated device performance; micro-machined XY stage; silicon; silicon chip design; Actuators; Lenses; Micromechanical devices; Optical collimators; Optical feedback; Optical fibers; Optical receivers; Optical sensors; Optical transmitters; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2005. Technical Digest. OFC/NFOEC
Print_ISBN
1-55752-783-0
Type
conf
DOI
10.1109/OFC.2005.192911
Filename
1501448
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