Title :
Micro-machined XY stage for fiber optics module alignment
Author :
Epitaux, Marc ; Verdeil, Jean-Marc ; Pétremand, Yves ; Noell, Wilifried ; De Rooij, Nicoolas F.
Author_Institution :
Intel, Newark, CA, USA
Abstract :
A novel silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. A MEMS micro-alignment method and silicon chip design are described. Finally the micro-fabricated device performance is discussed.
Keywords :
microlenses; micromachining; micromechanical devices; optical transmitters; optoelectronic devices; silicon; MEMS micro-alignment method; fiber optics module alignment; hybrid micro-lens; micro-fabricated device performance; micro-machined XY stage; silicon; silicon chip design; Actuators; Lenses; Micromechanical devices; Optical collimators; Optical feedback; Optical fibers; Optical receivers; Optical sensors; Optical transmitters; Silicon;
Conference_Titel :
Optical Fiber Communication Conference, 2005. Technical Digest. OFC/NFOEC
Print_ISBN :
1-55752-783-0
DOI :
10.1109/OFC.2005.192911
