DocumentCode
1875127
Title
Emission confinement on the (100) planes of etched tungsten field emitters coated with thin-film ZrC
Author
Xie, Tianhao ; Mackie, William A. ; Davis, Paul R.
Author_Institution
Linfield Res. Inst., McMinnville, OR, USA
fYear
2004
fDate
11-16 July 2004
Firstpage
166
Lastpage
167
Abstract
Field emission measurements were made on single crystal tungsten (100) emitters and were compared to emission measurements after coating with thin-film of zirconium carbide. The tungsten emitters were prepared using standard techniques. The emitter was then heated in steps with associated recording of emission data and images. The results showed a very marked emission confinement to the (100) crystallographic plane after coating with ZrC. The confined emission current was stabilized after falling to a lower lever. In a second set of experiments, (100) tungsten emitters were coated with NbC and ZrC in a separate deposition system and were placed in a 500 nm gate. The emitter were run at room temperature and at round 1800 K, emission confinement was again found on the (100) crystallographic plane. Emission stability was improved when the emitter was run at elevated temperatures. This research provided a method to obtain high current density field emission from a single tungsten tip coated with thin carbide film.
Keywords
crystal orientation; current density; etching; field emission; heating; materials preparation; tungsten; vapour deposited coatings; zirconium compounds; (100) crystallographic plane; 20 degC; 500 nm; W-ZrC-NbC; confined emission current; deposition system; emission confinement; emission stability; etched field emitters; field emission measurements; gate; high current density field emission; single crystal; single crystal emitters; thin-film coatings; Coatings; Crystallography; Current density; Etching; Niobium compounds; Stability; Temperature; Transistors; Tungsten; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN
0-7803-8397-4
Type
conf
DOI
10.1109/IVNC.2004.1354952
Filename
1354952
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