Fully-polymeric NEM relay for flexible, transparent, ultra-low power electronics and sensors

Author

Yanbiao Pan ; Fangzhou Yu ; Rutgers, Jaeseok Jeon

Author_Institution

State Univ. of New Jersey, Piscataway, NJ, USA

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

940

Lastpage

943

Abstract

A fully-polymeric nano-electro-mechanical (NEM) relay based on a conductive polymer, Poly(3,4-Ethylenedi oxythiophene):Polystyrene-Sulfonate (PEDOT:PSS) and dielectric polymers is proposed for the first time to enable flexible, transparent, ultralow-power electronics and sensors, and the first functional prototype fabricated using a five-mask low-thermal-budget process is demonstrated. The prototype shows zero off-state leakage current, abrupt on/off switching, complementary switching behavior, and relatively high on/off current ratio. Exploiting the water-absorption behavior of the polymers, the potential use of the relay as a biochemical sensor is also demonstrated.

Keywords

conducting polymers; dielectric materials; flexible electronics; leakage currents; low-power electronics; microrelays; PEDOT:PSS; biochemical sensor; complementary switching behavior; conductive polymer; dielectric polymers; five-mask low-thermal-budget process; flexible transparent ultra-low power electronics; fully-polymeric NEM relay; fully-polymeric nanoelectromechanical relay; on/off switching; poly(3,4-ethylenedi oxythiophene):polystyrene-sulfonate; sensors; water-absorption behavior; zero off-state leakage current; Films; Logic gates; Polymers; Relays; Sensors; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051115

Filename

7051115