Title :
Development of electron optical instrument for evaluation of multi emitters: real time observation of operating conditions of multi emitters by LEEM, PEEM and FEEM
Author :
Murata, H. ; Kimura, T. ; Nishimura, Y. ; Shimoyama, H. ; Mogami, A. ; Sakai, Y. ; Kudo, M. ; Kato, M. ; Betsui, K. ; Inoue, K.
Author_Institution :
Graduate Sch. of Sci. & Technol., Meijo Univ., Nagoya, Japan
Abstract :
An electron optical instrument for evaluation of emission characteristics of multi emitters is developed to perform the following functions: (1) observation and recording of dynamical behaviors of emission patterns from the whole multi emitter unit as well as each individual working emitter; (2) image observation of geometrical shapes of individual emitters and gates; (3) measurement of emission current stability from the whole multi emitter unit as well as each individual working emitter. A field emitter array type of multi emitter is used as a specimen. The instrument is found to have the capability of real time and simultaneous observation of LEEM and FEEM images as well as PEEM and FEEM images.
Keywords :
field emission electron microscopy; field emitter arrays; photoelectron microscopy; FEEM; LEEM; PEEM; dynamical behaviors of emission patterns; electron optical instrument; emission current stability; image observation of geometrical shapes; multiemitters evaluation; multiemitters operating conditions; real time observation; Current measurement; Electron emission; Electron optics; Geometrical optics; Instruments; Optical recording; Performance evaluation; Photoelectron microscopy; Shape measurement; Stimulated emission;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354965
