Multi-Functioning AFM Cantilever for Mechanical Tests: Indentation, Strip Bending and Adhesion Tests

This paper reports on the development of a novel AFM cantilever and its application to various mechanical tests for characterizing micro/nano-structures. We have designed and fabricated rhombus-shaped AFM cantilevers capable of performing multi-functioning tasks by using single crystal silicon (SCS) micromachining techniques. Structural improvement of the cantilever has clearly solved the crucial problems resulted from using conventional simple beam-AFM cantilever for mechanical testings. After force-calibration of the cantilever, various mechanical tests such as indentation, strip bending and adhesion tests are performed to determine the mechanical behaviors in micro/nano-scale as well as topographic imaging.