Title :
Fabrications of Spindt-type cathodes with aligned carbon nanotube emitters
Author :
Ding, Ming Q. ; Li, Xinghui ; Bai, Gucdong ; Feng, Jing J. ; Zhang, Fuqnan ; Liao, Fujiang
Author_Institution :
Nat. Lab. for High-power Electron., Beijing Vacuum Electron. Res. Inst., China
Abstract :
Two kinds of Spindt-type cathode arrays with vertically aligned carbon nanotubes (CNTs) emitters were fabricated. One process involved direct growth of CNTs from the bottom of each cell and the other process was to grow CNTs on Mo tips. The former had fairly good consistent emitters with a number of CNTs that depend on catalyst areas deposited, whereas the latter showed a few or single CNTs in micro-sized cells could be formed.
Keywords :
carbon nanotubes; catalysts; cathodes; field emitter arrays; C; Mo tips; Spindt-type cathode arrays; carbon nanotube growth; catalyst areas; microsized cells; single carbon nanotubes; vertically aligned carbon nanotube emitters; Carbon nanotubes; Cathodes; Costs; Diodes; Etching; Fabrication; Laboratories; Plasma temperature; Radio frequency; Robustness;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354979
