Title :
Enhanced controllability in MEMS metamaterial
Author :
Pitchappa, Prakash ; Chong Pei Ho ; You Qian ; Yu-Sheng Lin ; Singh, Navab ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
In this report, we demonstrate a method to enhance the controllability of MEMS tunable metamaterial by isolating the electrical routing of alternate lines in the metamaterial unit cell array. The metamaterial consists of alternate lines of split ring resonators with two released heights. This allows for two independent tuning characteristics for a single MEMS metamaterial by selecting between the two external control ports. This technology can be further improved to provide line or pixel wise control, and can even be programmed to have one of many functionalities such as tunable filter, multicolor spatial modulator, gradient metamaterial or random metamaterial.
Keywords :
electromagnetic metamaterials; micromechanical resonators; electrical routing isolation; enhanced controllability; gradient metamaterial; independent tuning characteristics; line wise control; metamaterial unit cell array; multicolor spatial modulator; pixel wise control; random metamaterial; single MEMS tunable metamaterial; split ring resonator; tunable filter; Magnetic materials; Metamaterials; Micromechanical devices; Silicon; Substrates; Tuning; Voltage measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051138
